Abstarct: Abstract In this thesis, static and dynamic behavior of a micro grepper modeled by cantilever microbeam, has been analyzed. The geometry of cantilever microbeam considered uniform and homogenous and its cross section is rectangular. The device under study includes a tip mass and subjected to an axial force, electrostatic and piezoelectric excitement. Electrostatic force acting by DC potential difference between microbeam and substrate. Also, piezoelectric excitement applied by DC potential difference on its laxyers. The cantilever in an Euler-Bernoulli beam and its viscoelastic property complies with Kenvin-Voigt model. The governing field equation and the associated nonlinear boundary conditions are derived using D’Alembert’s principle incorporate with the moment balance method that results in Mathieu-Hill differential equation. Static Deflection and Natural Frequencies achieved by Galerkin method. Because using Galerkin method, particulary with single mode approximation, Orthonormality condition derived. The effect of different parameter such as electrostatic voltage, length and voltage of piezoelectric laxyer on mechanical behavior investigated.